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VDT-6060
Collect
Substrate size: 300mm-1200mm VCD chamber volume: 400mm*400mm/700mm*700mm/700mm*1200mm/1300mm*2500mm (other options available) Vacuum Pumping Capacity: Rated from 10 seconds to 100Pa; 30 seconds to 10 pa VCD chamber lid opening method: cylinder automatically lifts the cover plate, PTFE pin pin automatically lifts the glass plate Control method: Vacuum gauge display or PLC touchscreen control Structure: Integrated (built-in vacuum pump) or split (external vacuum pump) Inner box material: SUS304# stainless steel Outer box material: SECC steel plate with premium baking paint |